Surface energy and frictional / adhesive properties of polymeric resist films

No Thumbnail Available
Identifiers
URI: https://hdl.handle.net/11556/4708
Publication date
2011
Authors
Advisors
Journal Title
Journal ISSN
Volume Title
Publisher
Citations
Google Scholar
Export
Research Projects
Organizational Units
Journal Issue
Abstract
The effect of plasma treatment on surface properties of resist films devoted for nanoimprint lithography (NIL) was studied. The Atomic Force Microscope was used to identify surface topography, pull-off force and lateral (friction ) force of the resist film before and after plasma treatment with the presence of nitrogen and hydrogen gases. The wettability was studied to estimate surface energy of the films both with polar and dispersion components. The AFM-based microtribometer enabled to study the frictional behavior of the resist films. The results of these extended studies have shown that the used plasma functionalization is effective to modify dramatically the surface properties of the resist films.
Description
Keywords
Adhesion , Friction , Resist films , Surface energy , Agronomy and Crop Science
Type
conference output
Citation
Koszewski , A , Jarzabek , D , Rymuza , Z & Obieta , I 2011 , ' Surface energy and frictional / adhesive properties of polymeric resist films ' , Paper presented at 6th International Scientific Conference on Tribology, BALTTRIB 2011 , Kaunas , Lithuania , 17/11/11 - 19/11/11 pp. 81-86 .
conference