TY  - CONF
AU  - Koszewski, A.
AU  - Jarzabek, D.
AU  - Rymuza, Z.
AU  - Obieta, I.
PY  - 2011
UR  - https://hdl.handle.net/11556/4708
AB  - The effect of plasma treatment on surface properties of resist films devoted for nanoimprint lithography (NIL) was studied. The Atomic Force Microscope was used to identify surface topography, pull-off force and lateral (friction ) force of the resist...
LA  - eng
TI  - Surface energy and frictional / adhesive properties of polymeric resist films
TY  - conference output
ER  -