Surface energy and frictional / adhesive properties of polymeric resist films

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dc.contributor.authorKoszewski, A.
dc.contributor.authorJarzabek, D.
dc.contributor.authorRymuza, Z.
dc.contributor.authorObieta, I.
dc.contributor.institutionTecnalia Research & Innovation
dc.date.accessioned2024-07-24T12:16:55Z
dc.date.available2024-07-24T12:16:55Z
dc.date.issued2011
dc.description.abstractThe effect of plasma treatment on surface properties of resist films devoted for nanoimprint lithography (NIL) was studied. The Atomic Force Microscope was used to identify surface topography, pull-off force and lateral (friction ) force of the resist film before and after plasma treatment with the presence of nitrogen and hydrogen gases. The wettability was studied to estimate surface energy of the films both with polar and dispersion components. The AFM-based microtribometer enabled to study the frictional behavior of the resist films. The results of these extended studies have shown that the used plasma functionalization is effective to modify dramatically the surface properties of the resist films.en
dc.description.statusPeer reviewed
dc.format.extent6
dc.identifier.citationKoszewski , A , Jarzabek , D , Rymuza , Z & Obieta , I 2011 , ' Surface energy and frictional / adhesive properties of polymeric resist films ' , Paper presented at 6th International Scientific Conference on Tribology, BALTTRIB 2011 , Kaunas , Lithuania , 17/11/11 - 19/11/11 pp. 81-86 .
dc.identifier.citationconference
dc.identifier.urihttps://hdl.handle.net/11556/4708
dc.identifier.urlhttp://www.scopus.com/inward/record.url?scp=84905864087&partnerID=8YFLogxK
dc.language.isoeng
dc.relation.ispartof
dc.relation.projectIDEuropean Commission
dc.rightsinfo:eu-repo/semantics/restrictedAccess
dc.subject.keywordsAdhesion
dc.subject.keywordsFriction
dc.subject.keywordsResist films
dc.subject.keywordsSurface energy
dc.subject.keywordsAgronomy and Crop Science
dc.titleSurface energy and frictional / adhesive properties of polymeric resist filmsen
dc.typeconference output
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