RT Conference Proceedings
T1 Surface energy and frictional / adhesive properties of polymeric resist films
A1 Koszewski, A.
A1 Jarzabek, D.
A1 Rymuza, Z.
A1 Obieta, I.
AB The effect of plasma treatment on surface properties of resist films devoted for nanoimprint lithography (NIL) was studied. The Atomic Force Microscope was used to identify surface topography, pull-off force and lateral (friction ) force of the resist film before and after plasma treatment with the presence of nitrogen and hydrogen gases. The wettability was studied to estimate surface energy of the films both with polar and dispersion components. The AFM-based microtribometer enabled to study the frictional behavior of the resist films. The results of these extended studies have shown that the used plasma functionalization is effective to modify dramatically the surface properties of the resist films.
YR 2011
FD 2011
LK https://hdl.handle.net/11556/4708
UL https://hdl.handle.net/11556/4708
LA eng
NO Koszewski , A , Jarzabek , D , Rymuza , Z & Obieta , I 2011 , ' Surface energy and frictional / adhesive properties of polymeric resist films ' , Paper presented at 6th International Scientific Conference on Tribology, BALTTRIB 2011 , Kaunas , Lithuania , 17/11/11 - 19/11/11 pp. 81-86 .
NO conference
DS TECNALIA Publications
RD 29 jul 2024