Morphology and N2 Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes

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dc.contributor.authorFernandez, Ekain
dc.contributor.authorSanchez-Garcia, Jose Angel
dc.contributor.authorViviente, J.L.
dc.contributor.authorvan Sint Annaland, Martin
dc.contributor.authorGallucci, Fausto
dc.contributor.authorPacheco Tanaka, David A.
dc.contributor.institutionTecnalia Research & Innovation
dc.contributor.institutionTECNOLOGÍAS DE HIDRÓGENO
dc.contributor.institutionTECNOLOGÍA DE MEMBRANAS E INTENSIFICACIÓN DE PROCESOS
dc.date.issued2016-02-10
dc.descriptionPublisher Copyright: © 2016 by the authors.
dc.description.abstractThe influence of the temperature during the growth of Pd-Ag films by PVD magnetron sputtering onto polished silicon wafers was studied in order to avoid the effect of the support roughness on the layer growth. The surfaces of the Pd-Ag membrane films were analyzed by atomic force microscopy (AFM), and the results indicate an increase of the grain size from 120 to 250–270 nm and film surface roughness from 4–5 to 10–12 nm when increasing the temperature from around 360–510 K. After selecting the conditions for obtaining the smallest grain size onto silicon wafer, thin Pd-Ag (0.5–2-µm thick) films were deposited onto different types of porous supports to study the influence of the porous support, layer thickness and target power on the selective layer microstructure and membrane properties. The Pd-Ag layers deposited onto ZrO2 3-nm top layer supports (smallest pore size among all tested) present high N2 permeance in the order of 10−6 mol•m−2•s−1•Pa−1 at room temperature.en
dc.description.statusPeer reviewed
dc.format.extent2319301
dc.identifier.citationFernandez , E , Sanchez-Garcia , J A , Viviente , J L , van Sint Annaland , M , Gallucci , F & Pacheco Tanaka , D A 2016 , ' Morphology and N2 Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes ' , unknown , vol. unknown , no. 2 , 210 . https://doi.org/10.3390/molecules21020210
dc.identifier.doi10.3390/molecules21020210
dc.identifier.otherresearchoutputwizard: 11556/143
dc.identifier.urlhttp://www.scopus.com/inward/record.url?scp=84964575211&partnerID=8YFLogxK
dc.language.isoeng
dc.relation.ispartofunknown
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subject.keywordspalladium-silver alloy
dc.subject.keywordsPVD magnetron sputtering
dc.subject.keywordsultra-thin film
dc.subject.keywordsH2 separation
dc.subject.keywordsfilm growth mechanisms
dc.subject.keywordspalladium-silver alloy
dc.subject.keywordsPVD magnetron sputtering
dc.subject.keywordsultra-thin film
dc.subject.keywordsH2 separation
dc.subject.keywordsfilm growth mechanisms
dc.subject.keywordsH separation
dc.subject.keywordsAnalytical Chemistry
dc.subject.keywordsChemistry (miscellaneous)
dc.subject.keywordsMolecular Medicine
dc.subject.keywordsPharmaceutical Science
dc.subject.keywordsDrug Discovery
dc.subject.keywordsPhysical and Theoretical Chemistry
dc.subject.keywordsOrganic Chemistry
dc.subject.keywordsFunding Info
dc.subject.keywordsThe presented work is funded within the FluidCELL project (Advanced m-CHP fuel CELL system based on a novel bio-ethanol Fluidized bed membrane reformer) as part of the European Union’s Seventh Framework Programme (FP7/2007-2013) for the Fuel Cells and Hydrogen Joint Technology (FCH JU) Initiative under Grant Agreement No. 621196. Note: “The present publication reflects only the authors’ views and the FCH JU and the Union are not liable for any use that may be made of the information contained therein”. This work is also partly funded by the MEMPORE project (Development of novel nanostructured membranes for micro-cogeneration (m-CHP)) (PI_2014_1_25) from the Basque Department of Education, Language policy and Culture. The authors would like to thank Rauschert Kloster Veilsdorf for providing the ceramic tubular supports.
dc.subject.keywordsThe presented work is funded within the FluidCELL project (Advanced m-CHP fuel CELL system based on a novel bio-ethanol Fluidized bed membrane reformer) as part of the European Union’s Seventh Framework Programme (FP7/2007-2013) for the Fuel Cells and Hydrogen Joint Technology (FCH JU) Initiative under Grant Agreement No. 621196. Note: “The present publication reflects only the authors’ views and the FCH JU and the Union are not liable for any use that may be made of the information contained therein”. This work is also partly funded by the MEMPORE project (Development of novel nanostructured membranes for micro-cogeneration (m-CHP)) (PI_2014_1_25) from the Basque Department of Education, Language policy and Culture. The authors would like to thank Rauschert Kloster Veilsdorf for providing the ceramic tubular supports.
dc.titleMorphology and N2 Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranesen
dc.typejournal article
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