Morphology and N2 Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes
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2016-02-10
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Abstract
The influence of the temperature during the growth of Pd-Ag films by PVD magnetron sputtering onto polished silicon wafers was studied in order to avoid the effect of the support roughness on the layer growth. The surfaces of the Pd-Ag membrane films were analyzed by atomic force microscopy (AFM), and the results indicate an increase of the grain size from 120 to 250–270 nm and film surface roughness from 4–5 to 10–12 nm when increasing the temperature from around 360–510 K. After selecting the conditions for obtaining the smallest grain size onto silicon wafer, thin Pd-Ag (0.5–2-µm thick) films were deposited onto different types of porous supports to study the influence of the porous support, layer thickness and target power on the selective layer microstructure and membrane properties. The Pd-Ag layers deposited onto ZrO2 3-nm top layer supports (smallest pore size among all tested) present high N2 permeance in the order of 10−6 mol•m−2•s−1•Pa−1 at room temperature.
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Publisher Copyright: © 2016 by the authors.
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palladium-silver alloy , PVD magnetron sputtering , ultra-thin film , H2 separation , film growth mechanisms , palladium-silver alloy , PVD magnetron sputtering , ultra-thin film , H2 separation , film growth mechanisms , H separation , Analytical Chemistry , Chemistry (miscellaneous) , Molecular Medicine , Pharmaceutical Science , Drug Discovery , Physical and Theoretical Chemistry , Organic Chemistry , Funding Info , The presented work is funded within the FluidCELL project (Advanced m-CHP fuel CELL system based on a novel bio-ethanol Fluidized bed membrane reformer) as part of the European Union’s Seventh Framework Programme (FP7/2007-2013) for the Fuel Cells and Hydrogen Joint Technology (FCH JU) Initiative under Grant Agreement No. 621196. Note: “The present publication reflects only the authors’ views and the FCH JU and the Union are not liable for any use that may be made of the information contained therein”. This work is also partly funded by the MEMPORE project (Development of novel nanostructured membranes for micro-cogeneration (m-CHP)) (PI_2014_1_25) from the Basque Department of Education, Language policy and Culture. The authors would like to thank Rauschert Kloster Veilsdorf for providing the ceramic tubular supports. , The presented work is funded within the FluidCELL project (Advanced m-CHP fuel CELL system based on a novel bio-ethanol Fluidized bed membrane reformer) as part of the European Union’s Seventh Framework Programme (FP7/2007-2013) for the Fuel Cells and Hydrogen Joint Technology (FCH JU) Initiative under Grant Agreement No. 621196. Note: “The present publication reflects only the authors’ views and the FCH JU and the Union are not liable for any use that may be made of the information contained therein”. This work is also partly funded by the MEMPORE project (Development of novel nanostructured membranes for micro-cogeneration (m-CHP)) (PI_2014_1_25) from the Basque Department of Education, Language policy and Culture. The authors would like to thank Rauschert Kloster Veilsdorf for providing the ceramic tubular supports.
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Fernandez , E , Sanchez-Garcia , J A , Viviente , J L , van Sint Annaland , M , Gallucci , F & Pacheco Tanaka , D A 2016 , ' Morphology and N2 Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes ' , unknown , vol. unknown , no. 2 , 210 . https://doi.org/10.3390/molecules21020210