Browsing by Author "Fernández, M."
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Item Influence of nitrogen implantation on the properties of Ti and substoichiometric TiNx films deposited on high speed steel(1998-08) Rodrigo, M. T.; Jiménez, C.; Vázquez, L.; Alonso, F.; Fernández, M.; Martínez-Duart, J. M.; Centros PRE-FUSION TECNALIA - (FORMER)Ti and TiNx (x < 1) thin films have been deposited on high speed steel (HSS) substrates by reactive sputtering and then N+ implanted. The increase of the N/Ti ratio of the films during deposition is related to a decrease in their roughness, and N+ implantation produces another additional slight decrease of the roughness. The hardness of samples increases with the nitrogen content in the as-deposited samples; nevertheless, N+-implanted Ti coatings show lower values of hardness than reactive sputtered TiNx films. α-Ti, ∈-Ti2N, and δ-TiN phases were identified by grazing x-ray diffraction.