Browsing by Author "Arroyo, O."
Now showing 1 - 1 of 1
Results Per Page
Sort Options
Item Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography(2005-11) Bilenberg, B.; Hansen, M.; Johansen, D.; Özkapici, V.; Jeppesen, C.; Szabo, P.; Obieta, I. M.; Arroyo, O.; Tegenfeldt, J. O.; Kristensen, A.; Tecnalia Research & InnovationWe present a one-step technology for fabrication of Topas-based lab-on-a-chip (LOC) microsystems by the use of thermal nanoimprint lithography (NIL). The technology is demonstrated by the fabrication of two working devices: a particle separator and a LOC with integrated optics for absorbance measurements. These applications demonstrate the fabrication of millimeter to micrometer-sized structures in one lithographic step. The use of NIL makes the technology easily scalable into the nanometer regime by the use of a suitable lithographic technique in the fabrication of the stamp. Processing issues such as environmental stress cracking of the Topas and the requirements to anti-sticking layers on the stamp when imprinting into Topas are discussed.