Bilenberg, B.Hansen, M.Johansen, D.Özkapici, V.Jeppesen, C.Szabo, P.Obieta, I. M.Arroyo, O.Tegenfeldt, J. O.Kristensen, A.2024-07-242024-07-242005-11Bilenberg , B , Hansen , M , Johansen , D , Özkapici , V , Jeppesen , C , Szabo , P , Obieta , I M , Arroyo , O , Tegenfeldt , J O & Kristensen , A 2005 , ' Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography ' , Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol. 23 , no. 6 , pp. 2944-2949 . https://doi.org/10.1116/1.20910891071-1023https://hdl.handle.net/11556/4243We present a one-step technology for fabrication of Topas-based lab-on-a-chip (LOC) microsystems by the use of thermal nanoimprint lithography (NIL). The technology is demonstrated by the fabrication of two working devices: a particle separator and a LOC with integrated optics for absorbance measurements. These applications demonstrate the fabrication of millimeter to micrometer-sized structures in one lithographic step. The use of NIL makes the technology easily scalable into the nanometer regime by the use of a suitable lithographic technique in the fabrication of the stamp. Processing issues such as environmental stress cracking of the Topas and the requirements to anti-sticking layers on the stamp when imprinting into Topas are discussed.6enginfo:eu-repo/semantics/openAccessjournal article10.1116/1.2091089Condensed Matter PhysicsElectrical and Electronic Engineeringhttp://www.scopus.com/inward/record.url?scp=29044433915&partnerID=8YFLogxK