TY  - JOUR
AU  - García-Luis, Alberto
AU  - Corengia, Pablo
AU  - González-Santamaría, Daniel
AU  - Brizuela, Marta
AU  - Braceras, Iñigo
AU  - Briz, Nerea
AU  - Azpiroz, Patxi
AU  - Bellido-González, Victor
AU  - Powell, Sarah
PY  - 2007
DO  - 10.1002/ppap.200731901
SN  - 1612-8850
UR  - https://hdl.handle.net/11556/4151
AB  - Plasma-polymerized hexamethyldisiloxane (PPHMDSO) films have been deposited using an ion gun inverse magnetron source at low pressure with Ar/O2/N2/HMDSO plasmas. Deposition rates and structures of the highly cross-linked PPHMDSO layers have been...
LA  - eng
TI  - Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source
TY  - journal article
ER  -