RT Journal Article T1 Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source A1 García-Luis, Alberto A1 Corengia, Pablo A1 González-Santamaría, Daniel A1 Brizuela, Marta A1 Braceras, Iñigo A1 Briz, Nerea A1 Azpiroz, Patxi A1 Bellido-González, Victor A1 Powell, Sarah AB Plasma-polymerized hexamethyldisiloxane (PPHMDSO) films have been deposited using an ion gun inverse magnetron source at low pressure with Ar/O2/N2/HMDSO plasmas. Deposition rates and structures of the highly cross-linked PPHMDSO layers have been determined. Surface mechanical properties were studied using the nanoindentation technique, and wettability was measured by contact angle method and modifications induced on optical properties were studied at different wavelengths. Results showed remarkable differences in hardness and contact angles of distilled water depending on the plasma conditions. In addition, plasma parameters also had a very significant effect on the background fluorescence. SN 1612-8850 YR 2007 FD 2007 LK https://hdl.handle.net/11556/4151 UL https://hdl.handle.net/11556/4151 LA eng NO García-Luis , A , Corengia , P , González-Santamaría , D , Brizuela , M , Braceras , I , Briz , N , Azpiroz , P , Bellido-González , V & Powell , S 2007 , ' Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source ' , Plasma Processes and Polymers , vol. 4 , no. SUPPL.1 , pp. S766-S770 . https://doi.org/10.1002/ppap.200731901 DS TECNALIA Publications RD 30 jul 2024