TY  - JOUR
AU  - Oñate, J. I.
AU  - García, A.
AU  - Bellido, V.
AU  - Viviente, J. L.
PY  - 1991
DO  - 10.1016/0257-8972(91)90115-D
SN  - 0257-8972
UR  - https://hdl.handle.net/11556/4370
AB  - Considerable interest has arisen during the last decade on the deposition of diamond and diamond-like films because of their unique properties which suggest a range of applications. This paper reports on the r.f. plasma chemical vapour deposition of...
LA  - eng
TI  - Deposition of hydrogenated B-C thin films and their mechanical and chemical characterization
TY  - journal article
ER  -