RT Journal Article
T1 Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography
A1 Bilenberg, B.
A1 Hansen, M.
A1 Johansen, D.
A1 Özkapici, V.
A1 Jeppesen, C.
A1 Szabo, P.
A1 Obieta, I. M.
A1 Arroyo, O.
A1 Tegenfeldt, J. O.
A1 Kristensen, A.
AB We present a one-step technology for fabrication of Topas-based lab-on-a-chip (LOC) microsystems by the use of thermal nanoimprint lithography (NIL). The technology is demonstrated by the fabrication of two working devices: a particle separator and a LOC with integrated optics for absorbance measurements. These applications demonstrate the fabrication of millimeter to micrometer-sized structures in one lithographic step. The use of NIL makes the technology easily scalable into the nanometer regime by the use of a suitable lithographic technique in the fabrication of the stamp. Processing issues such as environmental stress cracking of the Topas and the requirements to anti-sticking layers on the stamp when imprinting into Topas are discussed.
SN 1071-1023
YR 2005
FD 2005-11
LK https://hdl.handle.net/11556/4243
UL https://hdl.handle.net/11556/4243
LA eng
NO Bilenberg , B , Hansen , M , Johansen , D , Özkapici , V , Jeppesen , C , Szabo , P , Obieta , I M , Arroyo , O , Tegenfeldt , J O & Kristensen , A 2005 , ' Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography ' , Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol. 23 , no. 6 , pp. 2944-2949 . https://doi.org/10.1116/1.2091089
DS TECNALIA Publications
RD 29 jul 2024