%0 Journal Article
%A Bilenberg, B.
%A Hansen, M.
%A Johansen, D.
%A Özkapici, V.
%A Jeppesen, C.
%A Szabo, P.
%A Obieta, I. M.
%A Arroyo, O.
%A Tegenfeldt, J. O.
%A Kristensen, A.
%T Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography
%D 2005
%@ 1071-1023
%U https://hdl.handle.net/11556/4243
%X We present a one-step technology for fabrication of Topas-based lab-on-a-chip (LOC) microsystems by the use of thermal nanoimprint lithography (NIL). The technology is demonstrated by the fabrication of two working devices: a particle separator and a LOC with integrated optics for absorbance measurements. These applications demonstrate the fabrication of millimeter to micrometer-sized structures in one lithographic step. The use of NIL makes the technology easily scalable into the nanometer regime by the use of a suitable lithographic technique in the fabrication of the stamp. Processing issues such as environmental stress cracking of the Topas and the requirements to anti-sticking layers on the stamp when imprinting into Topas are discussed.
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