TY  - JOUR
AU  - Rodrigo, M. T.
AU  - Jiménez, C.
AU  - Vázquez, L.
AU  - Alonso, F.
AU  - Fernández, M.
AU  - Martínez-Duart, J. M.
PY  - 1998
DO  - 10.1557/JMR.1998.0296
SN  - 0884-2914
UR  - https://hdl.handle.net/11556/4495
AB  - Ti and TiNx (x < 1) thin films have been deposited on high speed steel (HSS) substrates by reactive sputtering and then N+ implanted. The increase of the N/Ti ratio of the films during deposition is related to a decrease in their roughness, and N+...
LA  - eng
TI  - Influence of nitrogen implantation on the properties of Ti and substoichiometric TiNx films deposited on high speed steel
TY  - journal article
ER  -