%0 Journal Article
%A Rodrigo, M. T.
%A Jiménez, C.
%A Vázquez, L.
%A Alonso, F.
%A Fernández, M.
%A Martínez-Duart, J. M.
%T Influence of nitrogen implantation on the properties of Ti and substoichiometric TiNx films deposited on high speed steel
%D 1998
%@ 0884-2914
%U https://hdl.handle.net/11556/4495
%X Ti and TiNx (x < 1) thin films have been deposited on high speed steel (HSS) substrates by reactive sputtering and then N+ implanted. The increase of the N/Ti ratio of the films during deposition is related to a decrease in their roughness, and N+ implantation produces another additional slight decrease of the roughness. The hardness of samples increases with the nitrogen content in the as-deposited samples; nevertheless, N+-implanted Ti coatings show lower values of hardness than reactive sputtered TiNx films. α-Ti, ∈-Ti2N, and δ-TiN phases were identified by grazing x-ray diffraction.
%~