TY - JOUR AU - Sansom, D. AU - Viviente, J. L. AU - Alonso, F. AU - Ugarte, J. J. AU - OƱate, J. I. PY - 1996 DO - 10.1016/S0257-8972(95)02769-6 SN - 0257-8972 UR - https://hdl.handle.net/11556/4295 AB - In the field of engineering materials, the study of titanium nitride (TiN) films has attracted great interest because of its unique combination of properties. This paper is concerned with the implantation of nitrogen or carbon ions into TiN films to... LA - eng TI - Ion implantation of TiN films with carbon or nitrogen for improved tribomechanical properties TY - journal article ER -