TY  - JOUR
AU  - Garcia, A.
AU  - Flaño, N.
AU  - Viviente, J. L.
AU  - Onate, J. I.
AU  - Gomez-Aleixandre, C.
AU  - Sanchez-Garrido, O.
PY  - 1993
DO  - 10.1016/0925-9635(93)90253-X
SN  - 0925-9635
UR  - https://hdl.handle.net/11556/4595
AB  - This paper reports on the study of mechanical properties of diamond films produced by microwave plasma chemical vapour deposition on silicon under different deposition conditions. The quality of films has been examined by scanning electron microscopy,...
LA  - eng
TI  - Micromechanical properties of diamond films deposited by microwave-plasma-enhanced chemical vapour deposition
TY  - journal article
ER  -