Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source

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dc.contributor.authorGarcía-Luis, Alberto
dc.contributor.authorCorengia, Pablo
dc.contributor.authorGonzález-Santamaría, Daniel
dc.contributor.authorBrizuela, Marta
dc.contributor.authorBraceras, Iñigo
dc.contributor.authorBriz, Nerea
dc.contributor.authorAzpiroz, Patxi
dc.contributor.authorBellido-González, Victor
dc.contributor.authorPowell, Sarah
dc.contributor.institutionTECNOLOGÍAS DE HIDRÓGENO
dc.contributor.institutionGENERAL
dc.contributor.institutionINGENIERÍA DE SUPERFICIES
dc.contributor.institutionSG
dc.date.accessioned2024-07-24T12:11:08Z
dc.date.available2024-07-24T12:11:08Z
dc.date.issued2007
dc.description.abstractPlasma-polymerized hexamethyldisiloxane (PPHMDSO) films have been deposited using an ion gun inverse magnetron source at low pressure with Ar/O2/N2/HMDSO plasmas. Deposition rates and structures of the highly cross-linked PPHMDSO layers have been determined. Surface mechanical properties were studied using the nanoindentation technique, and wettability was measured by contact angle method and modifications induced on optical properties were studied at different wavelengths. Results showed remarkable differences in hardness and contact angles of distilled water depending on the plasma conditions. In addition, plasma parameters also had a very significant effect on the background fluorescence.en
dc.description.statusPeer reviewed
dc.identifier.citationGarcía-Luis , A , Corengia , P , González-Santamaría , D , Brizuela , M , Braceras , I , Briz , N , Azpiroz , P , Bellido-González , V & Powell , S 2007 , ' Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source ' , Plasma Processes and Polymers , vol. 4 , no. SUPPL.1 , pp. S766-S770 . https://doi.org/10.1002/ppap.200731901
dc.identifier.doi10.1002/ppap.200731901
dc.identifier.issn1612-8850
dc.identifier.urihttps://hdl.handle.net/11556/4151
dc.identifier.urlhttp://www.scopus.com/inward/record.url?scp=70349411684&partnerID=8YFLogxK
dc.language.isoeng
dc.relation.ispartofPlasma Processes and Polymers
dc.rightsinfo:eu-repo/semantics/restrictedAccess
dc.subject.keywordsHexamethyldisiloxane (HMDSO)
dc.subject.keywordsIndentation
dc.subject.keywordsInfrared absorption spectroscopy (IR-AS)
dc.subject.keywordsOptical properties
dc.subject.keywordsPlasma polymerization
dc.subject.keywordsWettability
dc.subject.keywordsCondensed Matter Physics
dc.subject.keywordsPolymers and Plastics
dc.titleSynthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron sourceen
dc.typejournal article
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