Design of a microgripping system with visual and force feedback for MEMS applications

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dc.contributor.authorGiouroudi, I.
dc.contributor.authorHotzendorfer, H.
dc.contributor.authorAndrijasevic, D.
dc.contributor.authorFerros, M.
dc.contributor.authorBrenner, W.
dc.contributor.institutionCOMPOSITE
dc.date.issued2006
dc.description.abstractThis paper reports the design of a microgripping system with visual and force feedback for handling and assembly in microtechnology. The system consists of a microgripper, an electromagnetic microactuator, the Kleindiek Micromanipulator MM3A, a light microscope, a CCD camera and a computer. The microgripper is mounted on the Kleindiek Micromanipulator MM3A which has 3 degrees of freedom (two rotational axes, one linear axis), wide working range (240° in the rotational axes, 12 mm in the linear axis) and subnanometer resolution. An external CCD camera provides images for obtaining the actual axis positions and by applying inverse kinematics the actual position of the manipulators end-effector is calculated so as to perform coarse positioning. A second CCD camera in combination with a light microscope provides sufficiently precise data to perform the actual manipulation tasks. Since the gripper is electromagnetically driven, the movement of the gripper tips is a continuous mapping of the applied current. The applied current can be correlated to the actual distance between the tips by calibration. In case of gripping an object, the tips are hindered to close to the full extent. The resulting gripping force depends on the actual distance changes.en
dc.description.statusPeer reviewed
dc.format.extent8
dc.identifier.citationGiouroudi , I , Hotzendorfer , H , Andrijasevic , D , Ferros , M & Brenner , W 2006 , Design of a microgripping system with visual and force feedback for MEMS applications . in Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators, ICEPT . 11367 edn , 1662195 , Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators, ICEPT , pp. 243-250 , IET Seminar on MEMS Sensors and Actuators , London , United Kingdom , 27/04/06 . https://doi.org/10.1049/ic:20060465
dc.identifier.citationconference
dc.identifier.doi10.1049/ic:20060465
dc.identifier.isbn9780863416279
dc.identifier.urlhttp://www.scopus.com/inward/record.url?scp=67649992443&partnerID=8YFLogxK
dc.language.isoeng
dc.relation.ispartofInstitution of Engineering and Technology Seminar on MEMS Sensors and Actuators, ICEPT
dc.relation.ispartofseriesInstitution of Engineering and Technology Seminar on MEMS Sensors and Actuators, ICEPT
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subject.keywordsMicrohandling
dc.subject.keywordsMicromanipulation
dc.subject.keywordsVisual servoing
dc.subject.keywordsElectrical and Electronic Engineering
dc.titleDesign of a microgripping system with visual and force feedback for MEMS applicationsen
dc.typeconference output
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