Characterization of nanostructured Ti–B–(N) coatings produced by direct current magnetron sputtering
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2007-02-26
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Abstract
A series of Ti–B–(N) coatings prepared by dc magnetron sputtering using TiB2 targets in Ar/N2 gas mixtures has been chemically and structurally characterized by transmission electron microscopy, X-ray diffraction, electron energy-loss spectroscopy, and X-ray photoelectron spectroscopy. The influence of synthesis parameters such as applied heating power and nitrogen flow on the structure and chemical composition of the coatings has been studied. Independently of the experimental conditions employed during the synthesis, hexagonal TiB2 is the main crystalline phase present in the coatings. The use of N2 leads to the formation of an amorphous mixture of BN/TiN phases, as well as a diminution of the TiB2 crystalline phase. The influence of the composition and structure of the coatings on their hardness is also discussed.
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Ti–B–(N) , Transmission electron microscopy , X-ray photoelectron spectroscopy , Sputtering , Electron energy-loss spectroscopy , Ti–B–(N) , Transmission electron microscopy , X-ray photoelectron spectroscopy , Sputtering , Electron energy-loss spectroscopy , Electronic, Optical and Magnetic Materials , Surfaces and Interfaces , Surfaces, Coatings and Films , Metals and Alloys , Materials Chemistry , Funding Info , Spanish Ministry of Science and Education (Project references: MAT2001–1399/C02–01/02 and MAT2004–01052)_x000D_ CSIC (Program I3P). , Spanish Ministry of Science and Education (Project references: MAT2001–1399/C02–01/02 and MAT2004–01052)_x000D_ CSIC (Program I3P).
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López-Cartes , C , Martínez-Martínez , D , Sánchez-López , J C , Fernández , A , García-Luis , A , Brizuela , M & Onate , J I 2007 , ' Characterization of nanostructured Ti–B–(N) coatings produced by direct current magnetron sputtering ' , unknown , vol. unknown , no. 7-8 , pp. 3590-3596 . https://doi.org/10.1016/j.tsf.2006.11.013