The use of preliminary ion implantation and heating on the substrate for modifying TiN coating properties and TiN/substrate interface

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2001-07
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The influence of preliminary implantation of argon ions on a carbon steel substrate and deposition temperature on the texture and adhesion of TiN coatings deposited by cathodic arc plasma deposition has been investigated. The samples have been evaluated by glancing X-ray diffraction, Auger-electron spectroscopy and scratch adhesion testing. Strengthening of the (220) TiN texture with increasing ion implantation dose on the substrate has been revealed. An increment of deposition temperature (from 450 up to 720 K) leads to a more chaotic orientation of TiN crystallites. An increase of transitional layer thickness (by 60% for the Ti profile) is only observed when depositing the coating at high temperature (720 K). However, both the preliminary implantation process and the heating of the substrate lead to an adhesion improvement of TiN coatings.
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Solodukhin , I A , Khodasevich , V V , Uglov , V V , Brizuela , M & Oate , J I 2001 , ' The use of preliminary ion implantation and heating on the substrate for modifying TiN coating properties and TiN/substrate interface ' , Surface and Coatings Technology , vol. 142-144 , pp. 1144-1147 . https://doi.org/10.1016/S0257-8972(01)01190-2