Ion implantation of TiN films with carbon or nitrogen for improved tribomechanical properties

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dc.contributor.authorSansom, D.
dc.contributor.authorViviente, J. L.
dc.contributor.authorAlonso, F.
dc.contributor.authorUgarte, J. J.
dc.contributor.authorOñate, J. I.
dc.contributor.institutionTECNOLOGÍA DE MEMBRANAS E INTENSIFICACIÓN DE PROCESOS
dc.contributor.institutionCentros PRE-FUSION TECNALIA - (FORMER)
dc.contributor.institutionTecnalia Research & Innovation
dc.date.accessioned2024-07-24T12:12:36Z
dc.date.available2024-07-24T12:12:36Z
dc.date.issued1996-10
dc.description.abstractIn the field of engineering materials, the study of titanium nitride (TiN) films has attracted great interest because of its unique combination of properties. This paper is concerned with the implantation of nitrogen or carbon ions into TiN films to evaluate and obtain the optimum conditions for increased tribological resistance. A commercially available titanium nitride coating produced by ion plating, of approximately 3.5 μm thickness, was treated by implantation of nitrogen or carbon ions at energies of 100 and 75 keV, respectively. The dose range was between 5 × 1016 and 1 × 1018 ions cm-2. It has been observed that a suitable implantation procedure can lead to a maximum hardness improvement of about 15%, as evaluated with a dynamic micro-indentation method at loads from 0.4 to 10 mN. Wear tests performed on an unlubricated reciprocating apparatus, using an alumina ball with a load of 9.8 N and at a speed of 150 cycles min-1, showed that implantation of nitrogen and carbon can reduce wear by 22% and 42%, respectively. Small-area X-ray photoelectron spectroscopy (SAXPS) was used to evaluate the concentration of implanted elements as a function of depth. The analysis showed that in the high-dose C+-implanted sample a very high percentage of the carbon remained as pure carbon, whereas in the lower-dose C+-implanted sample the carbon stayed mainly in a carbidic form. In the case of nitrogen implantation, no large variations in the state or concentrations were recorded.en
dc.description.sponsorshipThe authors are grateful for the financial assistance provided by the Spanish “Comision Interministerial de Ciencia y Tecnologia” (CICYT) under project ref. MAT-95-0980-C02-02. Thanks are also extended to Balzers-Elay S.A. for performing the coating process.
dc.description.statusPeer reviewed
dc.format.extent5
dc.identifier.citationSansom , D , Viviente , J L , Alonso , F , Ugarte , J J & Oñate , J I 1996 , ' Ion implantation of TiN films with carbon or nitrogen for improved tribomechanical properties ' , Surface and Coatings Technology , vol. 84 , no. 1-3 , pp. 519-523 . https://doi.org/10.1016/S0257-8972(95)02769-6
dc.identifier.doi10.1016/S0257-8972(95)02769-6
dc.identifier.issn0257-8972
dc.identifier.urihttps://hdl.handle.net/11556/4295
dc.identifier.urlhttp://www.scopus.com/inward/record.url?scp=0030266278&partnerID=8YFLogxK
dc.language.isoeng
dc.relation.ispartofSurface and Coatings Technology
dc.relation.projectIDComisión Interministerial de Ciencia y Tecnología, CICYT, MAT-95-0980-C02-02
dc.rightsinfo:eu-repo/semantics/restrictedAccess
dc.subject.keywordsHardness
dc.subject.keywordsIon implantation
dc.subject.keywordsTiN coating
dc.subject.keywordsWear
dc.subject.keywordsGeneral Chemistry
dc.subject.keywordsCondensed Matter Physics
dc.subject.keywordsSurfaces and Interfaces
dc.subject.keywordsSurfaces, Coatings and Films
dc.subject.keywordsMaterials Chemistry
dc.titleIon implantation of TiN films with carbon or nitrogen for improved tribomechanical propertiesen
dc.typejournal article
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