Mechanical behavior and oxidation resistance of Cr (Al) N coatings
Author/s
Sánchez-López, J.C.; Martínez-Martínez, D.; López-Cartes, C.; Fernández, A.; Brizuela, Marta; [et al.]Date
2005-06-21Keywords
HARD COATINGS
N COATINGS
THIN-FILMS
CR-N
MICROSTRUCTURE
CrALN films
DEPOSITION
ALLOYS
Abstract
Nanocrystalline chromium nitride and ternary chromium aluminium nitride thin films were deposited by reactive magnetron sputtering of Cr and Al targets in argon/nitrogen atmosphere varying the sputtering power and gas composition. The coatings were characterized in terms of crystal phase, chemical composition, microstructure, and mechanical properties by x-ray diffraction, x-ray photoelectron spectroscopy, including x-ray-induced Auger electron spectroscopy, transmission electron microscopy, selected-area electron diffraction, electron energy-loss spectroscopy, cross-sectional scanning electron microscopy, and ultramicrohardness tester. The incorporation of Al in the composition of the films produces an increase in the mechanical properties (hardness and reduced Young's modulus) and an increased thermal resistance against oxidation in comparison to the pure CrN composition. The hardness behavior was attributed mainly to a reduction of the CrN crystallite size according to a Hall-Petch ...
Type
article