Development of highly permeable ultra-thin Pd-based supported membranes
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Author/sFernandez, Ekain; Sanchez-Garcia, Jose Angel; Melendez, Jon; Spallina, Vincenzo; van Sint Annaland, Martin; [et al.]
Palladium membrane preparation
PVD Magnetron Sputtering
This paper reports the preparation and characterization of ultra-thin (~1 µm thick) Pd-based supported membranes for hydrogen purification. Ultra-thin membranes have been prepared by a combination of PVD magnetron sputtering and electroless plating techniques. The membranes have been characterized for single gas and mix gas permeation at temperatures between 350 and 500 ºC and they have shown to exhibit very high hydrogen fluxes combined with a good perm-selectivity (H2/N2 ≈ 500). These results have been compared with the performance of highly permeable membranes reported in the literature. The influence of the morphology of the deposited Pd-based layers on the membrane performance has been investigated and discussed.